Journal
ACS APPLIED ELECTRONIC MATERIALS
Volume 3, Issue 3, Pages 1170-1177Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.0c01023
Keywords
X-ray photoelectron spectroscopy (XPS); Al2O3; GaN; MOSc-HEMTs; threshold voltage (V-TH)
Funding
- French national program Programme d'Investissements d'Avenir IRTNanoelec [ANR10-AIRT-05]
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Understanding the impact of GaN surface treatment conditions on dielectric/GaN interface chemical properties is crucial for device performance. Different wet treatments were studied prior to ALD of thin Al2O3 on Ga-polar GaN, and the results were correlated to the threshold voltage and donor defects in the resulting transistors. Wet treatments were also applied to AlGaN/GaN heterostructures for forming MOS-channel HEMTs on 200 mm GaN-on-Si wafers with CMOS compatible processing.
Understanding the impact of GaN surface treatment conditions on dielectric/GaN interface chemical properties is critically important for device performance. This point is under intensive research for the dielectric/GaN structure because GaN does not have a good native oxide quality such as SiO2 used in silicon technologies. The effects of different wet treatments prior to atomic layer deposition (ALD) of thin Al2O3 on Ga-polar GaN were studied by X-ray photoelectron spectroscopy (XPS). The same wet treatments have been applied to the recessed region of AlGaN/GaN heterostructures, followed by ALD of 30 nm Al2O3 in order to form MOS-channel high-electron-mobility transistors (MOSc-HEMTs) on 200 mm GaN-on-Si wafers with CMOS compatible processing. The resulting transistors exhibited a normally off behavior (threshold voltage V-TH = 0.4-0.6 V) and their V-TH was correlated to the oxidation at the Al2O3/GaN interface, suggesting the presence of donor defects.
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