4.6 Article

A dual-functional Ta/TaOx/Ru device with both nonlinear selector and resistive switching behaviors

Journal

RSC ADVANCES
Volume 11, Issue 30, Pages 18241-18245

Publisher

ROYAL SOC CHEMISTRY
DOI: 10.1039/d1ra02350k

Keywords

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Funding

  1. National Key RAMP
  2. D Program of China [2018AAA0103300]
  3. National Natural Science Foundation of China (NSFC) [61804171]
  4. Regional Innovation and Development Joint Fund of NSFC [U20A20220]
  5. Strategic Priority Research Program of the Chinese Academy of Sciences [XDB44000000]
  6. Major Scientific Research Project of Zhejiang Lab [2019KC0AD02]
  7. Beijing Academy of Artificial Intelligence (BAAI)

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In this work, a Ta/TaOx/Ru device is demonstrated to function as both a highly uniform and nonlinear selection device and a stable resistive switching device by controlling the voltage applied to the Ta electrode. The device shows high selectivity, current density, non-linear performance, and stable resistive switching behavior, potentially offering a solution for large-scale memristor arrays. Further research on the mechanism of Ta/TaOx devices is deepened with this study.
In this work, we demonstrate that a Ta/TaOx/Ru device can act as both a highly uniform and nonlinear selection device and a stable resistive switching device, respectively, by controlling the voltage applied to the Ta electrode. As a selection device, it shows high selectivity (10(3)), high current density (25 kA cm(-2)), very low variation, and good endurance. The non-linear performance of the device may be attributed to a trapezoidal band structure modulated by the concentration gradient of oxygen vacancies. Furthermore, with a large voltage bias on the Ta electrode, a repeatable and stable resistive switching behavior was observed, which could be attributed to the formation of conductive filaments probably composed of Ta metal and oxygen vacancies. This research deepens the understanding of the mechanism of Ta/TaOx devices, and provides a potential solution for large-scale memristor arrays.

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