Journal
IEEE SENSORS JOURNAL
Volume 21, Issue 13, Pages 14636-14644Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3072664
Keywords
Chemisorption; epsilon(k)-Ga2O3; HVPE; I-V characteristic; oxygen sensor; PSS
Funding
- Russian Science Foundation [20-79-10043]
- Russian Science Foundation [20-79-10043] Funding Source: Russian Science Foundation
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The electrical conductivity and gas sensitivity of alpha-Ga2O3/epsilon (kappa)-Ga2O3 structures were measured at various oxygen concentrations and temperatures. It was observed that the oxygen sensitivity of the structures depended on the donor dopant concentration. Structures doped with a specific amount of Sn showed high sensitivity to O2 at certain temperatures and bias voltages, attributed to the chemisorption of oxygen molecules on the surface reducing energy barriers between epsilon (kappa)-Ga2O3 grains.
Electrical conductivity and gas sensitivity of alpha-Ga2O3/epsilon (kappa)-Ga2O3 structures were measured for oxygen concentrations ranging from 2 % to 100 % and temperatures ranging from 25 degrees C to 220 degrees C. It was found that the oxygen sensitivity of the structures depended on the donor dopant concentration. The alpha-Ga2O3/epsilon(kappa)-Ga2O3 structures doped with similar to 1.5 x 10(17) cm(-3) of Sn showed high sensitivity to O-2 in the temperature range from 180 degrees C to 220 degrees C and at the bias voltage below 7.5 V. This effect can be attributed to the chemisorption of oxygen molecules on the surface of structures, which reduces energy barriers between epsilon(k)-Ga2O3 grains.
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