Journal
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)
Volume -, Issue -, Pages 202-205Publisher
IEEE
DOI: 10.1109/MEMS51782.2021.9375278
Keywords
MEMS; mmWave; 5G wireless communication; aluminum nitride; piezoelectric resonators; acoustic filters
Categories
Funding
- DARPA SPAR Program [HR0011-17-2-0002]
Ask authors/readers for more resources
This paper presents the first Aluminum Nitride (AlN) Combined Overtone Resonator (COR) in the 5G millimeter wave (mmWave) spectrum, with high performance and low loss, making it suitable for the implementation of multi-frequency filters.
This paper presents the first Aluminum Nitride (AlN) Combined Overtone Resonator (COR) in the 5G millimeter wave (mmWave) spectrum. The demonstrated AlN COR operates based on a multimodal excitation of the second and third order asymmetric Lamb-wave modes (A2 and A3) in a 389 nm thick AN film. The combined overtone is observed at 23.2 GHz with a high electromechanical coupling coefficient, k(t)(2),of 0.46% (Lateral-Field-Excited configurations with only top electrodes) and mechanical quality factor (Q(m)) of 254, providing a high f.Q >6e12. Additionally, the two-dimensional vibration mode of CORs allows the resonant frequency to be lithographically defined without significant k(t)(2) degradation. The demonstrated performance makes AN CORs a strong candidate for the implementation of low-loss miniaturized multi-frequency filters for mmWave 5G applications.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available