Journal
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)
Volume -, Issue -, Pages 196-199Publisher
IEEE
DOI: 10.1109/MEMS51782.2021.9375431
Keywords
Micromechanical devices; resonators; thermal stability; frequency stability; sensors
Categories
Funding
- Innovate UK
- Cambridge Centre for Smart Infrastructure and Construction
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A differential MEMS vibrating beam accelerometer with excellent stability is presented for seismology and gravimetry applications. It demonstrates outstanding linearity and low bias instability, setting new benchmarks for vibrating beam MEMS accelerometers.
A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of +/- 1 g (1 g = 9.8 m s(-2)) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times tau = 1 s - 1000 s with a best-case bias instability of < 10 ng and a noise floor of 10 ng root Hz. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.
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