☆
3.8
Proceedings Paper
A METHOD TO IMPROVE FABRICATION ACCURACY OF THREE-DIMENSIONAL MICROSTRUCTURES IN FOCUSED ION BEAM BITMAP MILLING
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)
Export Citation
No citation available
Rate this paper
The primary rating indicates the level of overall quality for the paper. Secondary ratings independently reflect strengths or weaknesses of the paper.
Create your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create NowBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started