Journal
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume 70, Issue -, Pages -Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2021.3092789
Keywords
Measurement error; piezoresistive pressure sensor; piezoresistor; pressure sensor; thermal compensation
Funding
- PADIS Program
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This article introduces a method for thermal compensation of pressure sensors using only the electrical signal produced by the sensors themselves, which has proven to be effective in reducing measurement errors.
Piezoresistive pressure sensors are employed in a wide range of applications, but their output signal shows a substantial dependence on the working temperature. Usually, there is a need for an additional component to ensure a proper temperature-compensated signal for the sensors. In this article, we describe a method for the sensor thermal compensation that uses only the electrical signal produced by the pressure sensors themselves, without the need of additional measurements. The method proved to be effective while also ensuring a significant reduction in the measurement error.
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