3.8 Proceedings Paper

Mechanical Characterization of Benzene cyclobutene (BCB) Used in Cu/polymer Hybrid Bonding

Publisher

IEEE COMPUTER SOC
DOI: 10.1109/ECTC32696.2021.00280

Keywords

Benzo cyclobutene (BCB); fiber Bragg grating (FBG); effective cure shrinkage; viscoelastic properties

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Three mechanical properties of Benzo cyclobutene (BCB) were characterized using various testing methods, including optical strain sensor, DMA testing, and hydrostatic testing, resulting in the determination of bulk modulus for the material.
Three mechanical properties of Benzo cyclobutene (BCB) are characterized. The effective cure shrinkage is measured by an optical strain sensor called fiber Bragg grating (FBG) embedded in a cylindrically shaped specimen. Conventional DMA testing is conducted to determine the temperature-frequency dependent storage modulus. Young's moduli master curve is constructed by shifting the frequency dependent data and shift factors are obtained. Finally, hydrostatic testing is conducted to determine bulk modulus.

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