Journal
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)
Volume -, Issue -, Pages 1279-1282Publisher
IEEE
DOI: 10.1109/TRANSDUCERS50396.2021.9495463
Keywords
UMC CMOS foundry; 0.18 mu m; flow sensor; self-heating
Funding
- Ministry of Science and Technology (MOST) of Taiwan [MOST 109-2221-E-032-001-MY3, 109-2221-E-032-002-MY2]
Ask authors/readers for more resources
This paper presents a new design of polysilicon flow sensor fabricated by UMC 0.18 μm CMOS MEMS foundry, with self-heating design and high sensitivity, achieving 89% sensitivity of Y.-K. Lee's work in IEEE MEMS 2020 within the speed range of 0-15 m/s. Tests with dummy specimen and orientation-free wind tunnel confirmed the sensor performance.
This paper reports a new design of polysilicon flow sensor fabricated by UMC 0.18 mu m CMOS MEMS foundry. Our self-heating design is different from the conventional one which has floating plate with resistive temperature detectors (RTDs) heated by another heater aside, and our self-heating RTD half-bridge is only 300 x 250 mu m(2) in chip size. This new design outputs a normalized sensitivity of 138 mu V/V/(m/s) within the speed range of 0-15 m/s. This sensitivity is 89% of Y.-K. Lee's work in IEEE MEMS 2020. The dummy specimen and the orientation-free wind tunnel tests also confirmed the sensor performance.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available