Journal
2021 SILICON NANOELECTRONICS WORKSHOP (SNW)
Volume -, Issue -, Pages 87-88Publisher
IEEE, ELECTRON DEVICES SOC & RELIABILITY GROUP
DOI: 10.1109/SNW51795.2021.00045
Keywords
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Funding
- Nanoscale Foundries and Fine Analysis projects - nffa.eu infrastructure [517]
- CINECA [HP10C3S9Z0]
- JSPS [18H03766]
- Ministero Affare Esteri, MEXT
- CNR Short Mobility program
- Grants-in-Aid for Scientific Research [18H03766] Funding Source: KAKEN
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We demonstrate the functionalization of silicon vacancies through single ion implantation of Ge atoms, forming stable GeV complexes, for position control of defects and electronic properties suitable for room temperature operations. Quantum transport measurements, supported by theoretical calculations, show differences in conductivity effects of disorder and temperature compared to conventional dopants.
We demonstrate the possibility to functionalize silicon vacancies through single ion implantation of Ge atoms, forming stable GeV complexes, to achieve position control of the defects and electronic properties suitable for room temperature operations. The quantum transport-measurements, supported by theoretical calculations, evidences differences compared to conventional dopants, concerning the effect of disorder and temperature on the conductivity.
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