Journal
2021 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS
Volume -, Issue -, Pages -Publisher
IEEE
DOI: 10.1109/DTIP54218.2021.9568674
Keywords
Zinc oxide; TCOs; CMOS Compatible
Funding
- French RENATECH network of technological facilities
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In this study, undoped ZnO and Al-doped ZnO (AZO) were synthesized by sol-gel method and deposited by spin coating. A comparative investigation was conducted on their optical, morphological, structural properties, and crystallinity. The results provide insights into the differences between undoped ZnO and AZO deposited by spin coating at 0.75M.
Undoped ZnO and Al-doped ZnO (AZO) were synthesized by sol-gel method and deposited by spin coating. Zinc acetate dehydrate was used as precursor, while ethanolamine and ethanol were used as stabilizer and solvent, respectively, and aluminum nitrate nonahydrate was used as dopant. A comparative study of undoped ZnO and Al-doped ZnO (AZO) deposited by spin-coating at 0.75M was carried out. In this study optical, morphological, structural properties and crystallinity were investigated.
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