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2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)
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IEEE
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The study demonstrates implantable neural probes with integrated silicon nitride optical phased arrays on 200mm wafers for wavelengths near 480nm, enabling emission of a single steerable beam.
We demonstrate implantable neural probes with integrated silicon nitride optical phased arrays (OPAs) fabricated on 200mm wafers for wavelengths near 480nm. A free-propagation slab enables the emission of a single steerable beam from an OPA. (c) 2021 The Author(s)
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