Fabrication of Integrated Electrode for pH Sensor Application

Integrated Electrode (IDEs), as a sensor, is a pervasive device in modern electronics and future hopes for producing a highly sensitive and selective sensor. In this work, a simple method of conventional photolithography for the fabrication of interdigitated electrodes is presented in detail. The structural of highly uniform IDEs device was optically characterized using high power microscope (HPM) and scanning electron microscope (SEM). Besides, the fabricated IDEs device was undergone electrical measurement with different pH. The result shows the highest current at 96 nA when the IDEs was tested with pH 10. Overall, our study establishes a correlation between structural and electrical properties of Al IDEs thin films with different pH

Automated summary

The study introduced a method for fabricating highly uniform IDEs devices using conventional photolithography, and characterized their structure optically using high power microscope and scanning electron microscope. Electrical measurements were conducted on the fabricated IDEs devices at different pH values, with the highest current of 96 nA observed at pH 10. This study establishes a correlation between the structural and electrical properties of Al IDEs thin films with varying pH levels.