Journal
MICROSYSTEMS & NANOENGINEERING
Volume 2, Issue -, Pages -Publisher
SPRINGERNATURE
DOI: 10.1038/micronano.2016.4
Keywords
NEMS; nanoelectromechanical amplifier; narrow-band filtering; displacement amplification; thermal piezoresistive resonance; effective quality factor improvement
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This study demonstrates amplification of electrical signals using a very simple nanomechanical device. It is shown that vibration amplitude amplification using a combination of mechanical resonance and thermal-piezoresistive energy pumping, which was previously demonstrated to drive self-sustained mechanical oscillation, can turn the relatively weak piezoresistivity of silicon into a viable electronic amplification mechanism with power gains of >20 dB. Various functionalities ranging from frequency selection and timing to sensing and actuation have been successfully demonstrated for microscale and nanoscale electromechanical systems. Although such capabilities complement solid-state electronics, enabling state-of-the-art compact and high-performance electronics, the amplification of electronic signals is an area where micro-/nanomechanics has not experienced much progress. In contrast to semiconductor devices, the performance of the proposed nanoelectromechanical amplifier improves significantly as the dimensions are reduced to the nanoscale presenting a potential pathway toward deep-nanoscale electronics. The nanoelectromechanical amplifier can also address the need for ultranarrow-band filtering along with the amplification of low-power signals in wireless communications and certain sensing applications, which is another need that is not efficiently addressable using semiconductor technology.
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