Journal
MICROSYSTEMS & NANOENGINEERING
Volume 2, Issue -, Pages -Publisher
SPRINGERNATURE
DOI: 10.1038/micronano.2016.19
Keywords
curved image plane; monocentric imager; photodiode; recessed negative trench profile
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- Google ATAP
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Compared with conventional planar optical image sensors, a curved focal plane array can simplify the lens design and improve the field of view. In this paper, we introduce the design and implementation of a segmented, hemispherical, CMOS-compatible silicon image plane for a 10-mm diameter spherical monocentric lens. To conform to the hemispherical focal plane of the lens, we use flexible gores that consist of arrays of spring-connected silicon hexagons. Mechanical functionality is demonstrated by assembling the 20-mu m-thick silicon gores into a hemispherical test fixture. We have also fabricated and tested a photodiode array on a silicon-on-insulator substrate for use with the curved imager. Optical testing shows that the fabricated photodiodes achieve good performance; the hemispherical imager enables a compact 160 degrees field of view camera with >80% fill factor using a single spherical lens.
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