Self-packaged high-resolution liquid metal nano-patterns

High-resolution self-packaged conductive patterns are important in integrated electronics used in harsh environments. One of the most promising candidates is gallium-based liquid due to its unique properties. Here, we introduce an advanced liquid metal nanopatterning technique based on pulsed laser lithography (PLL) to create self-packaged, high-resolution liquid metal patterns. The method described here, for the first time, can directly generate liquid metal nano-patterns with similar to 500-nm line width without being limited by laser beam size. Line-scanning pulsed-laser-induced shock and thermal effects could generate compression on the liquid metal to extrude similar to 200-nm particles to an similar to 30-nm layer covered by an similar to 20-nm oxide shell with boosted mechanical properties. When subjected to external damage, the electrical functionality of the nano-patterns is well maintained due to the protective self-packaged shell and its 3D structure. The electrically self-packaged material with high resolution is a promising candidate to serve in demanding applications with high integration densities.

Automated summary

This study introduces an advanced liquid metal nanopatterning technique based on pulsed laser lithography to create self-packaged, high-resolution liquid metal patterns. The method can generate high-resolution liquid metal nano-patterns by applying compression force, and the electrical functionality of the patterns is well maintained even when subjected to external damage.