Journal
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)
Volume -, Issue -, Pages 620-623Publisher
IEEE
DOI: 10.1109/MEMS51670.2022.9699681
Keywords
Piezoelectric; MEMS; speaker; actuation layer; rigid-flexible-coupling
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Funding
- Oceanic Interdisciplinary Program of Shanghai Jiao Tong University [SL2020ZD205]
- Scientific Research Fund of Second Institute of Oceanography, MNR [SL2020ZD205]
- Strategic Priority Research Program of Chinese Academy of Sciences [XDA 25040000]
- National Key R&D Program of China [2020YFB1313502]
- Program of Shanghai Academic/Technology Research Leader [18XD1401900]
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This paper presents a piezoelectric MEMS speaker with a rigid-flexible-coupling (RFC) actuation layer, which enhances the sound pressure level (SPL) at low frequencies and eliminates acoustic loss caused by unsealed vibration membrane, unlike existing technology.
This paper for the first time reports a piezoelectric microelectromechanical system (MEMS) speaker with a rigid-flexible-coupling (RFC) actuation layer, which not only improves the sound pressure level (SPL) in low frequency but also eliminates the acoustic loss of the unsealed vibration membrane compared to the state of the art.
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