Journal
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)
Volume -, Issue -, Pages 600-603Publisher
IEEE
DOI: 10.1109/MEMS51670.2022.9699661
Keywords
Micro-thermoelectric generator; thick film; electrodeposition; Bi2Te3; Sb2Te3; energy harvesting
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Funding
- Cabinet Office, Government of Japan, Cross-ministerial Strategic Innovation Promotion Program (SIP), (funding agency: The New Energy and Industrial Technology Development Organization, NEDO)
- JSPS KAKENHI [20K15147]
- Grants-in-Aid for Scientific Research [20K15147] Funding Source: KAKEN
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This study reports the fabrication and evaluation of a high-density micro-thermoelectric generator using electrodeposition, which has the potential to harvest energy from a small temperature difference for microdevices.
This work reports a fabrication and evaluation of a high-density micro-thermoelectric generator (micro-TEG) based on electrodeposition of Bi2Te3 and Sb2Te3. The TEG consists of 240 pairs of thermoelectric elements with dimensions of 200 mu m x 200 mu m x 80 mu m, which is formed on a small footprint of 0.8937 cm(2). An output voltage of the TEG reaches 20 mV under a temperature difference across the TEG of 1.5 degrees C. Moreover, energy harvesting from temperature fluctuations of the environment has been demonstrated. The proposed TEG with the high density shows a high potential to harvest from a small temperature difference at near room temperature as a power source for microdevices.
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