Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 21, Issue -, Pages 320-327Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TNANO.2022.3186472
Keywords
Ga2O3; LPCVD; light trapping; UV photodetectors
Categories
Funding
- SERB [CRG/2021/006815]
- Council of Scientific and Industrial Research (CSIR), India through Senior Research Fellowship
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A deep ultraviolet photodetector based on Sn-doped Ga2O3 and SnO2 nanostructures has been developed, exhibiting high sensitivity and performance.
The harmful UV radiation leaking out of the ozone hole can have a detrimental effect on mother nature. To monitor any UV rays leaking out of the ozone hole requires an electronic device such as deep UV photodetectors. In this context, Sn-doped Ga2O3 incorporated with SnO2 nanostructures has been grown on a c-plane sapphire substrate using low-pressure chemical vapor deposition (LPCVD) followed by the fabrication of metalsemiconductor-metal (MSM) based deep ultraviolet (UV) photodetector (PD) using Pt as electrodes with interdigitated geometry. The PD possesses a low dark current of 21 nA even at 50 V bias with a very high photo-to-dark current ratio of 9 x 10(4) and exceptionally large responsivity of 1532 and 262 A/W under 254 nm and 302 nm UV-illumination respectively. Consequently, an extremely high detectivity of 1.7 x 10(15) Jones and external quantum efficiency of 7.4 x 10(5) % has been recorded under 254 nm illumination with a fast fall time of 0.2 sec. The PD works well in UV-B range with high responsivity and is attributed to the long wavelength absorption by the SnO2 nanostructures accompanied by a charge transfer from SnO2 to the Ga2O3 layer. The high gain has been attributed to the photoconductive gain due to interface trapped charges and self-trapped holes, along with light trapping on the textured Ga2O3 surface.
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