Journal
JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 49, Issue -, Pages 1402-1411Publisher
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S1600576716010347
Keywords
Laue micro-diffraction; rainbow-filtered micro-diffraction; strain mapping; Ge micro-devices
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Funding
- CEA DSM-DRT
- CEA
- Swiss National Science Foundation
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Laue micro-diffraction and simultaneous rainbow-filtered micro-diffraction were used to measure accurately the full strain tensor and the lattice orientation distribution at the sub-micrometre scale in highly strained, suspended Ge micro-devices. A numerical approach to obtain the full strain tensor from the deviatoric strain measurement alone is also demonstrated and used for faster full strain mapping. The measurements were performed in a series of micro-devices under either uniaxial or biaxial stress and an excellent agreement with numerical simulations was found. This shows the superior potential of Laue micro-diffraction for the investigation of highly strained micro-devices.
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