Journal
IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 7, Pages 1117-1120Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3179205
Keywords
Acoustics; Ultrasonic transducers; Art; Fingerprint recognition; Vibrations; Shape; Piezoelectric transducers; Piezoelectric micromachined ultrasonic transducers (PMUTs); acoustodynamics; gigahertz ultrasonics; superposition; anisotropy
Categories
Funding
- National Science Foundation for Young Scientists of China [12002201]
- Program of Shanghai Academic/Technology Research Leader of China [19XD1421600]
- Shanghai Sailing Program of Shanghai Science and Technology Committee of China [19YF1425000]
- Shanghai Jiao Tong University Global Strategic Partnership Fund [2021 SJTU-CORNELL]
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In this work, a newly developed optical imaging method was used to study the acoustodynamic physics in gigahertz unreleased ultrasonic transducers based on an AlN-on-silicon system. The study revealed the phenomena of mode superposition, anisotropic transduction, and dynamic mode evolution, highlighting the importance of shear motion in anisotropic transduction.
In this work, we employed our newly developed optical imaging method to probe detailed acoustodynamic physics in gigahertz unreleased ultrasonic transducers based on an AlN-on-silicon system, revealing mode superposition, anisotropic transduction, and dynamic mode evolution. Superpositioned upon the dominant breathing mode along the vertical direction of the AlN layer, multiple resonant lateral modes are identified, and they are shown to evolve into a surface mode beyond the piezoelectric transduction envelope, with strong anisotropic transduction brought by the shear motion of silicon. This acoustodynamic property is important for verifying and further improving design theories of broadband piezoelectric transducers and thin film piezoelectric-on-substrate systems in general.
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