Journal
JOURNAL OF MATERIALS CHEMISTRY C
Volume 10, Issue 39, Pages 14549-14559Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/d2tc02872g
Keywords
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Funding
- National Natural Science Foundation of China [51901060, 12004090]
- National Key Research and Development Program of China [2019YFE0121700]
- National Natural Science Foundation of Zhejiang Province [LY21E010004, LQ21A040009]
- Fundamental Research Funds for the Provincial Universities of Zhejiang [GK209907299001-025, GK219909299001003]
- Key Research Project of Zhejiang Lab [2022MG0AB02]
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This paper reports the design and fabrication of an anisotropic Ag nanocavity array using magnetron sputtering and ion beam etching techniques. The size and position of the nanocavities can be controlled by adjusting the etching angle and film thickness. The research shows that the nanocavity array exhibits angle-dependent surface-enhanced Raman scattering (SERS) and can eliminate background signals.
This paper reports the design and fabrication of an anisotropic Ag nanocavity array, which mainly uses magnetron sputtering and ion beam etching techniques to get the ordered Ag nanocavity array on the polystyrene templates. The nanocavity array can be used as an active substrate for polarized Raman scattering to eliminate polarization-independent background clutters. By controlling the etching angle of the ion beam and the film thickness of the sample, the size of the Ag nanocavity and the position of hot spots can be tuned. The polarized extinction spectra and the polarization Raman test further show the anisotropy of the nanocavity array, which leads to angle-dependent SERS observations. The three-dimensional simulation results of the polarized electric field are consistent with the polarized Raman spectroscopy results, and the fundamental reason for the response of an anisotropic nanostructure to polarized light is found. The angle-dependent SERS excited by polarized light is used to eliminate the background signals, which finally leads to improved SERS signals.
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