4.7 Article

Highly sensitive and fast response strain sensor based on evanescently coupled micro/nanofibers

Journal

OPTO-ELECTRONIC ADVANCES
Volume 5, Issue 9, Pages -

Publisher

CAS, INST OPTICS & ELECTRONICS, ED OFF OPTO-ELECTRONIC JOURNALS
DOI: 10.29026/oea.2022.210101

Keywords

optical micro; nanofiber; strain sensor; pressure sensor; micro -displacement; directional coupler

Categories

Funding

  1. National Natural Science Foundation of China [61975173]
  2. National Key Research and Development Program of China [SQ2019YFC170311]
  3. Major Scientific Research Project of Zhejiang Lab [2019MC0AD01]
  4. Key Research and Development Project of Zhejiang Province [2021C05003]
  5. Quantum Joint Funds of the Natural Foundation of Shandong Province [ZR2020LLZ007]
  6. CIE-Tencent Robotics X Rhino -Bird Focused Research Program [2020-01-006]

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This research presents a highly sensitive and fast response optical strain sensor with potential applications in electronic skins, wearable medical devices, and robots. The sensor demonstrates a high gauge factor and strain resolution, enabling it to be used for various purposes such as physiological signal monitoring, voice recognition, and micro-displacement detection.
Flexible strain sensors play an important role in electronic skins, wearable medical devices, and advanced robots. Herein, a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers (MNFs) embedded in a polydimethylsiloxane (PDMS) film is proposed. The strain sensor exhibits a gauge factor as high as 64.5 for strain <= 0.5% and a strain resolution of 0.0012% which corresponds to elongation of 120 nm on a 1 cm long device. As a proof-of-concept, highly sensitive fingertip pulse measurement is realized. The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa-1 enable the sensor for sound detection. Such versatile sensor could be of great use in physiological signal monitoring, voice recognition and micro-displacement detection.

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