4.5 Review

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Journal

JOURNAL OF SENSORS
Volume 2016, Issue -, Pages -

Publisher

HINDAWI LTD
DOI: 10.1155/2016/3816094

Keywords

-

Funding

  1. Ministry of Science, ICT and Future Planning of Korea via KOFST
  2. NRF Programs [2011-0028736, 2013-K000315]
  3. Moldova Government [15.817.02.29F]
  4. ASM-STCU [5937]
  5. National Research Foundation of Korea [2012R1A2A1A03670475, 162S-2-3-1691] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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The paper considers SnO2 and In2O3 thin films as materials for the design of solid-state conductometric ozone sensors in depth. In particular, the present review covers the analysis of the fundamentals of SnO2- and In2O3-based conductometric ozone sensor operation. The main focus is on the description of mechanisms of ozone interaction with metal oxides, the influence of air humidity on sensor response, and processes that control the kinetics of sensor response to ozone.

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