Related references
Note: Only part of the references are listed.Fabrication challenges for indium phosphide microsystems
N. P. Siwak et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2015)
Compact nanomechanical plasmonic phase modulators
B. S. Dennis et al.
NATURE PHOTONICS (2015)
Design and modeling of an ultra-compact 2x2 nanomechanical plasmonic switch
Vladimir A. Aksyuk
OPTICS EXPRESS (2015)
Large-scale silicon photonic switches with movable directional couplers
Sangyoon Han et al.
OPTICA (2015)
Rotational MEMS mirror with latching arm for silicon photonics
Jonathan Briere et al.
MOEMS AND MINIATURIZED SYSTEMS XIV (2015)
An Optomechanical Transducer Platform for Evanescent Field Displacement Sensing
Marcel W. Pruessner et al.
IEEE SENSORS JOURNAL (2014)
Optical MEMS: From Micromirrors to Complex Systems
Olav Solgaard et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2014)
Process Control of Cantilever Deflection for Sensor Application Based on Optical Waveguides
Fei Jiang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2013)
Experimental study of sensitivity dependences on waveguide position and diaphragm thickness in silicon-based guided-wave optical accelerometer
Natsumi Saito et al.
OPTICAL ENGINEERING (2013)
Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry-Perot-Based Accelerometer Integrated With Channel Waveguides
Kazem Zandi et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2012)
Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm
Masashi Ohkawa et al.
OPTICAL ENGINEERING (2012)
Ultra-small silicon waveguide coupler switch using gap-variable mechanism
Yuta Akihama et al.
OPTICS EXPRESS (2011)
Integrated waveguide-DBR microcavity opto-mechanical system
Marcel W. Pruessner et al.
OPTICS EXPRESS (2011)
Mechanically tunable optical filters with a microring resonator
Dooyoung Hah et al.
APPLIED OPTICS (2011)
Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities
Mo Li et al.
APPLIED PHYSICS LETTERS (2010)
Nanomechanical Proximity Perturbation for Switching in Silicon-Based Directional Couplers for High-Density Photonic Integrated Circuits
Rohit Chatterjee et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)
Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator
Taro Ikeda et al.
OPTICS EXPRESS (2010)
An ultrasmall wavelength-selective channel drop switch using a nanomechanical photonic crystal nanocavity
Yoshiaki Kanamori et al.
APPLIED PHYSICS LETTERS (2009)
Moving Polymer Waveguides and Latching Actuator for 2 x 2 MEMS Optical Switch
Hao-Bing Liu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2009)
Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators
Jin Yao et al.
OPTICS LETTERS (2009)
Submicron silicon waveguide optical switch driven by microelectromechanical actuator
Erdal Bulgan et al.
APPLIED PHYSICS LETTERS (2008)
A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator
Kazunori Takahashi et al.
OPTICS EXPRESS (2008)
Silicon microtoroidal resonators with integrated MEMS tunable coupler
Jin Yao et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2007)
Electro-optic effect exaltation on lithium niobate photonic crystals due to slow photons
M. Roussey et al.
APPLIED PHYSICS LETTERS (2006)
Si photonic wire waveguide devices
Hirohito Yamada et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2006)
Tunable silicon microring resonator with wide free spectral range
Magdalena S. Nawrocka et al.
APPLIED PHYSICS LETTERS (2006)
Layout controlled one-step dry etch and release of MEMS using deep RIE on SOI wafer
Liu Haobing et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)
Tunable coupling regimes of silicon microdisk resonators using MEMS actuators
MCM Lee et al.
OPTICS EXPRESS (2006)
End-coupled optical waveguide MEMS devices in the indium phosphide material system
MW Pruessner et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2006)
Fast 10-μs microelectromechanical optical switch inside a planar hollow waveguide (PHW)
R Guerre et al.
JOURNAL OF LIGHTWAVE TECHNOLOGY (2006)
InP-Based optical waveguide MEMS switches with evanescent coupling mechanism
MW Pruessner et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications
R Guerre et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Integrated wavelength-selective optical MEMS switching using ring resonator filters
GN Nielson et al.
IEEE PHOTONICS TECHNOLOGY LETTERS (2005)
MEMS-Actuated microdisk resonators with variable power coupling ratios
MCM Lee et al.
IEEE PHOTONICS TECHNOLOGY LETTERS (2005)
Monolithic suspended optical waveguides for InP MEMS
DP Kelly et al.
IEEE PHOTONICS TECHNOLOGY LETTERS (2004)
Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator
DT Fuchs et al.
ELECTRONICS LETTERS (2004)
A hybrid MEMS-waveguide wavelength selective cross connect
DT Fuchs et al.
IEEE PHOTONICS TECHNOLOGY LETTERS (2004)
Vibration measurement with a micromachined mirror in a very-short external cavity laser
F Chollet et al.
SENSORS AND ACTUATORS A-PHYSICAL (2004)
Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres
T Shoji et al.
ELECTRONICS LETTERS (2002)
1x2 MOEMS switch based on silicon-oninsulator and polymeric waveguides
T Bakke et al.
ELECTRONICS LETTERS (2002)
Optical MEMS devices based on moving waveguides
E Ollier
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2002)
Planar microoptomechanical waveguide switches
T Bakke et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2002)
Share Paper
