Effect of substrate temperature on the structure, electrical and optical properties of Mo doped ZnO films

Mo-doped ZnO (MZO) transparent conductive thin films were prepared on glass substrate under various substrate temperature from 50 degrees C to 200 degrees C. The microstructural, electrical and optical properties of the MZO films were investigated by X-ray diffraction (XRD), Hall effect and UV-vis spectrophotometer. Based on XRD measurements, all films are polycrystalline with preferential c-axis growth. The lowest resistivity was obtained to be 2.8 x 10(-3) Omega.cm. According to X-ray photoelectron spectroscopy (XPS) measurement, the valence of the Mo ions in the ZnO matrix is a mixture of +5 and +6. In addition, the transmittance of the film is 80% throughout the visible light region. Our results indicate that the MZO films are suitable for potential transparent optoelectronic applications. (C) 2016 Elsevier B.V. All rights reserved.