Journal
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS
Volume 211, Issue -, Pages 135-140Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mseb.2016.05.020
Keywords
Molybdenum-doped ZnO; Magnetron sputtering; Transparent conductive oxides films
Funding
- National Natural Science Foundation of China [61176126, 11205248]
- Natural Science Foundation of Hebei Province of China [F2013202001]
- Science and Technology Program of Hebei Province [15214305D]
- project for Science and Technology Correspondent of Tianjin City [14JCTPJC00524]
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Mo-doped ZnO (MZO) transparent conductive thin films were prepared on glass substrate under various substrate temperature from 50 degrees C to 200 degrees C. The microstructural, electrical and optical properties of the MZO films were investigated by X-ray diffraction (XRD), Hall effect and UV-vis spectrophotometer. Based on XRD measurements, all films are polycrystalline with preferential c-axis growth. The lowest resistivity was obtained to be 2.8 x 10(-3) Omega.cm. According to X-ray photoelectron spectroscopy (XPS) measurement, the valence of the Mo ions in the ZnO matrix is a mixture of +5 and +6. In addition, the transmittance of the film is 80% throughout the visible light region. Our results indicate that the MZO films are suitable for potential transparent optoelectronic applications. (C) 2016 Elsevier B.V. All rights reserved.
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