Journal
MRS COMMUNICATIONS
Volume -, Issue -, Pages -Publisher
SPRINGER HEIDELBERG
DOI: 10.1557/s43579-023-00482-8
Keywords
2D materials; Biomaterial; Graphene; Lithography (deposition)
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Researchers demonstrate a method of applying photolithography on curved substrates by performing the process on a planar surface and transferring the completed photopattern to the curved substrate. Two release layers, graphene-based and gelatin-based, are utilized for successful direct patterning of gold features on the curved substrate, enabling the patterning of electronically relevant materials on transparent curved surfaces.
There is increasing interest in applying microfabrication techniques to a wide variety of non-traditional substrates including curved substrates and bio-relevant substrates. Photolithography is a standard microfabrication technique, but its use on non-planar substrates is hampered by the requirement to supply a constant illumination across a curved surface, and transparent curved surfaces are often completely inaccessible to photopatterning. Here, we demonstrate an approach where the photolithography is performed and developed on a planar surface and the completed photopattern is then transferred to an arbitrary substrate. We achieve this transfer using two different release layers: a graphene-based layer which can produce closed windows, and a gelatin-based layer which produces open windows. In the gelatin case, we show that we can pattern gold features directly on a curved substrate with at least 2-mu m fidelity. This capability enables use of photolithography for direct patterning of electronically relevant materials onto transparent curved surfaces.
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