4.4 Article

Atom counting from a combination of two ADF STEM images

Journal

ULTRAMICROSCOPY
Volume 255, Issue -, Pages -

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ELSEVIER
DOI: 10.1016/j.ultramic.2023.113859

Keywords

Atomic resolution scanning transmission electron microscopy; Atom counting; Heterogeneous nanostructures; Multivariate Gaussian mixture model; 4D STEM

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This article presents a statistics-based method for accurately counting the number of atoms in nanostructures, especially for images acquired with low electron doses and multiple element structures.
To understand the structure-property relationship of nanostructures, reliably quantifying parameters, such as the number of atoms along the projection direction, is important. Advanced statistical methodologies have made it possible to count the number of atoms for monotype crystalline nanoparticles from a single ADF STEM image. Recent developments enable one to simultaneously acquire multiple ADF STEM images. Here, we present an extended statistics-based method for atom counting from a combination of multiple statistically independent ADF STEM images reconstructed from non-overlapping annular detector collection regions which improves the accuracy and allows one to retrieve precise atom-counts, especially for images acquired with low electron doses and multiple element structures.

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