4.6 Article

Diamond nucleation with dynamic magnetic field in hot filament chemical vapor deposition

Journal

VACUUM
Volume 218, Issue -, Pages -

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2023.112661

Keywords

Diamond nucleation; Dynamic magnetic field; Electron-stimulated desorption; Chemical vapor deposition; Angular frequency

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The study investigates the effects of a dynamic magnetic field on diamond nucleation using various analysis techniques. The results show that the dynamic magnetic field enhances diamond nucleation and improves the crystal grain size and crystallinity of the deposited diamonds. The study also reveals that the angular frequency of the dynamic magnetic field affects the diamond nucleation density, and this enhancement is associated with electric field excitation.
The magnetic field is an important non-contacting energy field that can affect material synthesis. In this study, a dynamic magnetic field with an angular frequency of 100 pi rad/s was applied in hot filament chemical vapor deposition, and its effects on diamond nucleation were intensively investigated by scanning electron microscopy, transmission electron microscopy, atomic force microscope, grazing incidence X-ray diffraction, and Raman spectroscopy. The results showed that the dynamic magnetic field enhanced diamond nucleation, with deposited diamonds having a large crystal grain size and high crystallinity. Furthermore, the angular frequency of the dynamic magnetic field was varied from 83 to 600 pi rad/s, and the diamond nucleation density was measured to clarify the corresponding enhancement of the dynamic magnetic field. The diamond nucleation density zigzagged from 1.48 x 109 to 2.49 x 109 cm-2 over the investigated angular frequency range but was well-fitted to the electric field excited by a dynamic magnetic field. The enhancement of the dynamic magnetic field in diamond nucleation was ascribed to electron-stimulated hydrogen desorption.

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