Emission of the backscattered electron in the energy range of 20 to100 keV

This paper presented the theoretical model of backscattered electron emission BEE, and the universal formulas for some parameters such as ri(h, Epo, Z) andf(x, Epo, Z) at Epo = 20-100 keV were deduced, respectively; where Epo is the incident energy of primary electron,f(x, Epo, Z) is maximum penetration depth distribution of emitted backscattered electron BE from atomic number Z bulk metals penetrated by primary electrons at Epo, x is the distance from incident surface to the position where primary electrons are reflected back, ri(h, Epo, Z) is the backscattering coefficient at Epo of Z metal films with film thickness h. From the deduced universal formula for ri(h, Epo, Z) and the relationships among the parameters of BEE from Au, W, Ag and Mo, the special formulas for some parameters such as ri(h, Epo, Z) andf(x, Epo, Z) of W and Mo were also obtained and proved correct, respectively.

Automated summary

This paper presents a theoretical model for backscattered electron emission (BEE) and derives universal formulas for certain parameters within a specific energy range. These formulas can be used to calculate the backscattering coefficient and the maximum penetration depth distribution of backscattered electrons for different metals.