Related references
Note: Only part of the references are listed.A comprehensive review on micro- and nano-scale gas flow effects: Slip-jump phenomena, Knudsen paradox, thermally-driven flows, and Knudsen pumps
Hassan Akhlaghi et al.
PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS (2023)
Highly Integrated μGC Based on a Multisensing Progressive Cellular Architecture with a Valveless Sample Inlet
Weilin Liao et al.
ANALYTICAL CHEMISTRY (2023)
A monolithic Si-micromachined four-stage Knudsen pump for μGC applications
Tsenguun Byambadorj et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2021)
Stress Analysis and Characterization of PECVD Oxide/Nitride Multi-Layered Films After Thermal Cycling
Kuo-Shen Chen et al.
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY (2021)
Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process
Yemin Tang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2018)
Design, analysis, and characterization of stress-engineered 3D microstructures comprised of PECVD silicon oxide and nitride
Chia-Hsing Pi et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2016)
Graphene microdrums on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors
Qiugu Wang et al.
NANOSCALE (2016)
Demonstration of a gas separator composed of Knudsen pumps
Shoeji Nakaye et al.
VACUUM (2016)
A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants
Yutao Qin et al.
MICROSYSTEMS & NANOENGINEERING (2016)
A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI
Seungdo An et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015)
Fabrication challenges and test structures for high-aspect-ratio SOI MEMS devices with refilled electrical isolation trenches
Jin Xie
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2015)
A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum
Seungdo An et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2014)
Nanoporous Bi2Te3 thermoelectric based Knudsen gas pump
Abderrazzak Faiz et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2014)
Scavenged body heat powered infusion pump
Alexander Bell et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)
Fracture toughness of silicon nitride thin films of different thicknesses as measured by bulge tests
B. Merle et al.
ACTA MATERIALIA (2011)
Porous ceramics for multistage Knudsen micropumps-modeling approach and experimental evaluation
Naveen K. Gupta et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2011)
Thermal transpiration in mixed cellulose ester membranes: Enabling miniature, motionless gas pumps
Naveen K. Gupta et al.
MICROPOROUS AND MESOPOROUS MATERIALS (2011)
Demonstration of motionless Knudsen pump based micro-gas chromatography featuring micro-fabricated columns and on-column detectors
Jing Liu et al.
LAB ON A CHIP (2011)
Microvalves and Micropumps for BioMEMS
Anthony K. Au et al.
MICROMACHINES (2011)
High aspect ratio silicon etch: A review
Banqiu Wu et al.
JOURNAL OF APPLIED PHYSICS (2010)
Knudsen pump driven by a thermoelectric material
Kunal Pharas et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Deep reactive ion etching as a tool for nanostructure fabrication
Y. Q. Fu et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2009)
Glass frit bonding: an universal technology for wafer level encapsulation and packaging
R Knechtel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2005)
Fabrication of keyhole-free ultra-deep high-aspect-ratio isolation trench and its applications
Y Zhu et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
Ellipsometric study of polycrystalline silicon films prepared by low-pressure chemical vapor deposition
P Petrik et al.
JOURNAL OF APPLIED PHYSICS (2000)