Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone

Article Engineering, Electrical & Electronic

Miniaturized High-Frequency Humidity Sensor Based on Quartz Crystal Microbalance

Lihui Feng et al.

Summary: This article presents a high-performance and portable high-frequency quartz crystal microbalance (QCM) sensor. By coating a specific mixed solution to create a sensitive film, it is able to measure various environmental parameters with high sensitivity and low detection limit.

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT (2022)

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Article Nanoscience & Nanotechnology

Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection

Renxin Wang et al.

Summary: Inspired by the auditory organs of pectis jellyfish, a new sensor design for sensitive detection of low-frequency underwater sounds has been developed, with high sensitivity and shock resistance. This sensor is promising for long-range detection of submarines in the 20-200 Hz frequency range.

MICROSYSTEMS & NANOENGINEERING (2021)

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Article Engineering, Multidisciplinary

Design and realization of cap-shaped cilia MEMS vector hydrophone

Shan Zhu et al.

Summary: The cap-shaped ciliary vector hydrophone (CCVH) proposed in this paper shows excellent performance in low-frequency detection with increased sensitivity compared to previous designs. The simplified integration process ensures better performance, and the CCVH demonstrates effective detection of underwater ship noise.

MEASUREMENT (2021)

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Article Engineering, Electrical & Electronic

Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Peng Chen et al.

Summary: This paper introduces a sculpture-shape cilium MEMS vector hydrophone (SCVH) designed to enhance sensitivity, increase signal resolution, and achieve a working frequency band of 1 kHz, outperforming traditional CVH. Experimental results show SCVH has a sensitivity of -184.2 dB at 1 kHz, 13.1 dB higher than traditional CVH, with a working frequency band of 20 Hz-1 kHz and a depth of 8-shaped directivity concave point greater than 30 dB.

SENSORS AND ACTUATORS A-PHYSICAL (2021)

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Article Engineering, Multidisciplinary

Design and implementation of beaded cilia MEMS vector hydrophone

Ting Lv et al.

Summary: A novel underwater moving targets detection technology is proposed in this paper, utilizing a beaded cilia MEMS vector hydrophone (BCVH) to improve sensitivity and directivity. Through theoretical analysis and simulation, the design scheme and optimal size of BCVH are determined, and experiment results show superior performance compared to previous designs.

MEASUREMENT (2021)

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Article Physics, Applied