Journal
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS
Volume -, Issue -, Pages 594-597Publisher
IEEE
DOI: 10.1109/MEMS49605.2023.10052385
Keywords
3D printing; two-photon polymerization; shadow masking; strain gauge transducer; Laser Doppler Vibrometer; custom MEMS; low-volume manufacturing
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3D printing of MEMS devices enables cost-efficient production of custom-designed and complex 3D MEMS for prototyping and low-volume applications. This research presents the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization and metal strain gauge transducers. The resonance frequency, responsivity, and signal stability of the 3D-printed accelerometer were measured over a period of 10 hours.
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.
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