Journal
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS
Volume -, Issue -, Pages 740-743Publisher
IEEE
DOI: 10.1109/MEMS49605.2023.10052517
Keywords
Contact electrification; oxygen plasma treatment; electret; water energy harvesting
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This paper proposes an innovative water charging method for the first time, where the charge-transfer mechanism is suppressed by steering oxygen plasma treatment. The 3D charge distribution map of NPU shape is obtained through the surface potential scanner. The method is applied to DEG and a self-powered thin-film sensor with droplet position monitoring function is prepared. This study demonstrates the feasibility of the proposed water charging method and proposes a new application in the field of water energy harvesting.
Contact electrification has been studied since as early as 2,600 years ago, but its mechanism is still unclear, especially for liquid-solid cases. In this paper, an innovative water charging method is proposed for the first time. The charge-transfer mechanism is suppressed by the steerable oxygen plasma treatment, and the 3D charge distribution map of NPU shape is obtained through the surface potential scanner. The method was further applied to the DEG and a self-powered thin-film sensor with droplet position monitoring function was prepared. This study demonstrates the feasibility of the proposed water charging method and proposes a new application in the field of water energy harvesting.
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