A MINIATURIZED TRANSIT-TIME ULTRASONIC FLOWMETER USING PMUTS FOR LOW-FLOW MEASUREMENT IN SMALL-DIAMETER CHANNELS

In this paper, we report a miniaturized transit-time ultrasonic flowmeter (TTUF) for low-flow measurement in small-diameter channels. The proposed TTUF contains two pieces of ScAlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) and a pi-type channel. The PMUTs contain 169 (13 x 13) square cells with the dimension of 2.8 x 2.8 mm(2), showing good transmitting sensitivity and receiving sensitivity at frequency of 1MHz in water. Experiment results show that the developed TTUF provides a wide range of flow measurements from 2 to 300 L/h with 1 % repeatability in the channel of 4 mm diameter, which is smaller than most of the reported ones.

Automated summary

In this paper, a miniaturized transit-time ultrasonic flowmeter (TTUF) for low-flow measurement in small-diameter channels is presented. The proposed TTUF consists of two ScAlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) and a pi-type channel. The experiment results show that the developed TTUF provides a wide range of flow measurements from 2 to 300 L/h with 1% repeatability in the channel of 4 mm diameter, which is smaller than most of the reported ones.