Journal
AIP ADVANCES
Volume 6, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4947132
Keywords
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Funding
- National Natural Science Foundation of China [61102002, 61272076, 51371101]
- SRF for ROCS, SEM
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Films with a structure of Ta (5 nm)/Co20Fe60B20 (0.8-1.5 nm)/MgO (1 nm)/Ta (1 nm) were deposited on Corning glass substrates by magnetron sputtering. The as-deposited films with CoFeB layer thickness from 0.8 to 1.3 nm show perpendicular magnetic anisotropy (PMA). After annealing at a proper temperature, the PMA of the films can be enhanced remarkably. A maximum effective anisotropy field of up to 9 kOe was obtained for 1.0- and 1.1-nm-thick CoFeB layers annealed at an optimum temperature of 300 degrees C. A 4-kOe magnetic field was applied during annealing to study its effect on the PMA of the CoFeB layers. The results confirmed that applying a perpendicular magnetic field during annealing did not improve the maximum PMA of the films, but it did enhance the PMA of the thinner films at a lower annealing temperature. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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