Journal
AIP ADVANCES
Volume 6, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4953805
Keywords
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Funding
- MIUR (PRIN)
- INFN (HUMOR project)
- MIUR under the FIRB-Futuro in ricerca funding program [RBFR13QUVI]
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In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiNx membranes were fabricated and used as optomechanical resonators in a Michelson interferometer, where Q values up to 1.3 x 10(6) were measured at cryogenic temperatures, and in a Fabry-Perot cavity, where an optical finesse up to 50000 has been observed. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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