3.8 Proceedings Paper

Contact Resistances to n- and p-type 2D Semiconductors MoS2 and WSe2 with Moire Lattice Interfaces

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IEEE
DOI: 10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134429

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We find that Moire lattices between metal contacts and n-type MoS2 or ambipolar WSe2 layers prefer physisorptive sites with weaker Fermi level pinning rather than chemisorptive sites. This leads to a sharp difference in the Schottky pinning factor, S. S for physisorbed interfaces is around 0.36, while S is strongly pinned at 0.21 for chemisorbed sites. This explains the observed experimental results for In, Ag, and Pd contacts.
We show how Moire lattices between metal contacts and n-type MoS2 or ambipolar WSe2 layers can favor physisorptive sites with weaker Fermi level pinning rather than chemisorptive sites. This distinction causes a sharp difference in Schottky pinning factor, S. S for physisorbed interfaces is similar to 0.36, while S is a strongly pinned 0.21 for chemisorbed sites. Thus, Ef lies close to the conduction band for physi- In or Ag on MoS2, while Pd lies near the valence band for p-type WSe2. This explains the experimental results for In, Ag and Pd contacts.

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