Journal
AIP ADVANCES
Volume 6, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4943401
Keywords
-
Funding
- European Commission [NMP3-LA-2010-246102]
- DFG [SFB 762]
Ask authors/readers for more resources
We have investigated the conductance of nanostructures fabricated from the quasitwo-dimensional electron gas (q2DEG) formed at the LaAlO3/SrTiO3 ( LAO/STO) interface. Measurements were done at room temperature and at T=4.2 K. Our findings show that the fully industry compatible nano- patterning process conserves the conductivity except for a small temperature dependent sidewall depletion which we attribute to etch damage induced by the dry etching process. (c) 2016 Author(s).
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
