Journal
IEEE PHOTONICS JOURNAL
Volume 8, Issue 3, Pages -Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOT.2016.2561622
Keywords
Integrated optics; ring resonator; optical properties
Funding
- European Union [209, 601126 210]
- Dutch Foundation for Fundamental Research on Matter under FOM-Projectruimte [10NQO02, 12PR2994]
- MARIE SKLODOWSKA-CURIE Individual Fellowship under REA [661416]
- Marie Curie Actions (MSCA) [661416] Funding Source: Marie Curie Actions (MSCA)
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In this paper, we characterize the Thermo-optic properties of silicon nitride ring resonators between 18 and 300 K. The Thermo-optic coefficients of the silicon nitride core and the oxide cladding are measured by studying the temperature dependence of the resonance wavelengths. The resonant modes show low temperature dependence at cryogenic temperatures and higher dependence as the temperature increases. We find the Thermo-optic coefficients of PECVD silicon nitride and silicon oxide to be 2.51 +/- 0.08 E-5 K-1 and 0.96 +/- 0.09 E-5 K-1 at room temperature while decreasing by an order of magnitude when cooling to 18 K. To show the effect of variations in the thermo-optic coefficients on device performance, we study the tuning of a fully integrated electrically tunable filter as a function of voltage for different temperatures. The presented results provide new practical guidelines in designing photonic circuits for studying low-temperature optical phenomena.
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