Journal
THIN SOLID FILMS
Volume 598, Issue -, Pages 315-334Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.05.035
Keywords
Atmospheric pressure plasma; Flexible electronic devices; Surface activation and treatment surface texturing; Sintering
Categories
Funding
- Industrial Strategic Technology Development program - Ministry of Knowledge Economy (MKE, Korea) [10041926]
- MOTIE (Ministry of Trade, Industry Energy [10049065]
- KSRC (Korea Semiconductor Research Consortium)
Ask authors/readers for more resources
Recently, non-equilibrium atmospheric pressure plasma, especially those operated at low gas temperatures, have become a topic of great interest for the processing of flexible and printed electronic devices due to several benefits such as the reduction of process and reactor costs, the employment of easy-to-handle apparatuses and the easier integration into continuous production lines. In this review, several types of typical atmospheric pressure plasma sources have been addressed, and the processes including surface treatment, texturing and sintering for application to flexible and printed electronic devices have been discussed. (C) 2015 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available