4.8 Article

Microscale Silicon Origami

Journal

SMALL
Volume 12, Issue 39, Pages 5401-5406

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201601947

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Funding

  1. Office of Associate Dean for Research at Ira A. Fulton School of Engineering
  2. Office of Knowledge Enterprise and Development, Arizona State University
  3. NSF [CMMI-0700440]

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A new methodology to create 3D origami patterns out of Si nanomembranes using pre-stretched and pre-patterned polydimethylsiloxane substrates is reported. It is shown this approach is able to mimic paper-based origami patterns. The combination of origami-based microscale 3D architectures and stretchable devices will lead to a breakthrough on reconfi gurable systems.

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