Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 228, Issue -, Pages 649-657Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2016.01.092
Keywords
Photonic sensor; Dye thin films; Gas sensor; UV sensor; Room-temperature Wafer level packaging
Funding
- EU (Phodye Strep Project) [033793]
- EU (ERC Starting Grant MM's) [277879]
- Spanish Ministry of Economy and Competitiveness [MAT-2010-21228]
- Junta de Andalucia [P09-TEP-5283]
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We report on dye-based photonic sensing systems which are fabricated and packaged at wafer scale. For the first time luminescent organic nanocomposite thin-films deposited by plasma technology are integrated in photonic sensing systems as active sensing elements. The realized dye-based photonic sensors include an environmental NO2 sensor and a sunlight ultraviolet light (UV) A+B sensor. The luminescent signal from the nanocomposite thin-films responds to changes in the environment and is selectively filtered by a photonic structure consisting of a Fabry-Perot cavity. The sensors are fabricated and packaged at wafer-scale, which makes the technology viable for volume manufacturing. Prototype photonic sensor systems have been tested in real-world scenarios. (C) 2016 Elsevier B.V. All rights reserved.
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