Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 235, Issue -, Pages 525-534Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2016.05.102
Keywords
Micromachined gas sensor; Nanowires; Electrodes; Optimization
Funding
- SoMoPro II Programme - European Union
- South Moravian Region [4SGA8678]
- Spanish Ministry of Science and Innovation [TEC-2013-48147]
- project A new types of electronic circuits and sensors for specific applications [FEKT-S-14-2300]
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Chemoresistive micromachined gas sensors with bottom-electrode configuration and based on Pt functionalized tungsten oxide nanowires are fabricated. The performance and reliability of three types of devices with different electrode gap (5, 10 and 15 mu m) are analyzed in dry and humid ambient and towards various analytes (H-2, NO2, EtOH, and CO). Results demonstrate an improved response, sensitivity, and stability with better dynamic of the response for the sensors with the electrode gap of 5 mu m, showing up to 7-fold higher responses and 32-fold faster responses towards hydrogen compared to the sensors with the electrode gap of 10 or 15 mu m. These results are connected with the increment of the density of nanowire junctions across the electrodes with 5 mu m gap; separation that corresponds to half of the length of the wires used in this work. (C) 2016 Elsevier B.V. All rights reserved.
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