4.7 Article

Low-cost flexible pressure sensor based on dielectric elastomer film with micro-pores

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 240, Issue -, Pages 103-109

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2016.01.037

Keywords

Flexible pressure sensor; PDMS; Porous film; e-Skin

Funding

  1. National Research Foundation - Korea government (MSIP) [2011-0028422]
  2. National Research Foundation of Korea [2011-0028422] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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We developed a low-cost flexible pressure sensor based on an elastomer film with uniformly distributed micro-pores as a dielectric layer. The dispersion of the micro-pores in the elastomer film results from the phase separation between a prepolymer material and deionized water to the elastomer, followed by the subsequent evaporation of the solvent within the polymer matrix after polymerization. Owing to the enhanced deformability by the pore structures, the relatively high sensitivity of 1.18 kPa(-1) in the low pressure (<0.02 kPa) as well as the fast response time of 150 ms was achieved. The sensitivity was found to primarily vary with the porosity of the elastomer film. Due to the highly elastic and flexible features of the porous film fabricated in a simple way, our pressure sensor is applicable for advanced touch panels with more human-friendly interfaces and skin sensors that allow the detection of a small change in pressure. (C) 2016 Elsevier B.V. All rights reserved.

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