Journal
SENSORS
Volume 17, Issue 1, Pages -Publisher
MDPI
DOI: 10.3390/s17010067
Keywords
accelerometer; capacitive sensing; microelectromechanical systems (MEMS); synchronous demodulation; transimpedance amplifier
Funding
- Spanish Economy and Competitiveness Ministry under European Regional Development Fund (MINECO-FEDER) [TEC2014-52840-R]
- MINECO fellowship program [BES-2015-073748]
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In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-mu m CMOS technology and its power consumption is only 54 mu W. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/root Hz at 50 kHz, which corresponds to 100 mu g/root Hz.
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