Journal
SENSORS
Volume 16, Issue 1, Pages -Publisher
MDPI
DOI: 10.3390/s16010069
Keywords
piezoelectric diaphragm biosensor; lead-free; chemical solution deposition
Funding
- International Science & Technology Cooperation Program of China [2011DFA51880]
- 111 Project of China [B14040]
- Shaanxi Province International Collaboration Program [2012KW-02]
- Shaanxi Science & Technology Promotion Program [2011TG-08]
- Qianren Program of the Chinese Government
- Natural Science and Engineering Research Council of Canada (NSERC)
- United States Office of Naval Research [N00014-12-1-1045]
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In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/g. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.
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