Journal
SENSORS
Volume 16, Issue 10, Pages -Publisher
MDPI
DOI: 10.3390/s16101660
Keywords
pressure sensor; silicon carbide; ultrasonic assisted machining; bonding; harsh environment
Funding
- National Key Basic Research Program of China [2015CB059900]
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Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1-0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature.
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