Journal
SCRIPTA MATERIALIA
Volume 113, Issue -, Pages 75-78Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2015.09.040
Keywords
Cathodic arc evaporation; Tantalum nitride; Thermal stability
Categories
Funding
- Austrian Federal Ministry of Economy, Family and Youth
- National Foundation for Research, Technology and Development
- Plansee Composite Materials GmbH
- Oerlikon Balzers
- X-Ray Center
- University Service Centre for Transmission Electron Microscopy, TU Wien
- Oerlikon Surface Solutions AG
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Differential scanning calorimetty and thermogravimetric analyses combined with XRD and TEM investigations demonstrate that single-phase face-centred cubic Ta0.89Al0.11N1.2 coatings decompose into wurtzite AlN and hexagonal Ta2N phases upon vacuum annealing to 1500 degrees C. The Ta2N phase transformation proceeds via hexagonal Ta5N6 at similar to 1000 degrees C and hexagonal epsilon-TaN at similar to 1100 degrees C. A significant N-2-loss between 1300 degrees C and 1500 degrees C, without a structural change of the Ta2N phase, suggests the formation of TaN0.3 at the Ta-rich Ta2N phase field. (C) 2015 Elsevier Ltd. All rights reserved.
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