Journal
SCIENCE
Volume 351, Issue 6274, Pages 691-695Publisher
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.aad3345
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Funding
- French Government [L'Agence Nationale de la Recherche (ANR) ASTRID program, MISE project]
- Chair of Excellence from the Airbus Group
- European Research Council (ERC)
- Fluid Interface Reactions, Structures and Transport (FIRST) Center, an Energy Frontier Research Center - U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences
- French RENATECH network
- ANR (Labex Store-Ex)
- ANR (MISE project)
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Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young's modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.
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